Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818583 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Keiichi Nagakubo | 2017-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818583 | Electrode plate for plasma etching and plasma etching apparatus | Naoyuki Satoh, Keiichi Nagakubo | 2017-11-14 |