Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627192 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Kazuki Kosai, Kazuhiro Teraoka, Fumihiro Kamimura | 2017-04-18 |
| 9598969 | Turbine, manufacturing method thereof, and power generating system | Kunihiko Wada, Satoru Kuboya, Daizo Saito, Hideyuki Maeda, Nobuhiro Okizono +2 more | 2017-03-21 |