Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671459 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2017-06-06 |