KU

Kosei Ueda

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #342,094 of 506,227Top 70%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9793136 Plasma etching method Yoshinobu Hayakawa 2017-10-17