Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793102 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kensuke Takahashi | 2017-10-17 |
| 9734993 | Semiconductor manufacturing apparatus | Atsushi Kobayashi, Akira Yasumuro | 2017-08-15 |