Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842747 | Substrate liquid processing apparatus, exhaust switching unit and substrate liquid processing method | Keisuke Tsugao | 2017-12-12 |
| 9666463 | Substrate processing apparatus | Katsuhiro Morikawa, Issei Ueda, Akira Murata | 2017-05-30 |