Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754797 | Etching method for selectively etching silicon oxide with respect to silicon nitride | Hikaru Watanabe | 2017-09-05 |
| 9633864 | Etching method | Hikaru Watanabe | 2017-04-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754797 | Etching method for selectively etching silicon oxide with respect to silicon nitride | Hikaru Watanabe | 2017-09-05 |
| 9633864 | Etching method | Hikaru Watanabe | 2017-04-25 |