Todd Henry

VA Varian Semiconductor Equipment Associates: 1 patents #54 of 139Top 40%

📍 Boxford, MA: #15 of 31 inventorsTop 50%

🗺 Massachusetts: #4,682 of 13,044 inventorsTop 40%

Overall (2017): #213,649 of 506,227Top 45%

Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
9613813	Method for improving critical dimension variability by implanting argon or silicon ions into a patterned mask	Steven R. Sherman	2017-04-04