Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741624 | Spacer shaper formation with conformal dielectric film for void free PMD gap fill | — | 2017-08-22 |
| 9704720 | Uniform, damage free nitride ETCH | David Gerald Farber | 2017-07-11 |
| 9659935 | Dielectric liner added after contact etch before silicide formation | — | 2017-05-23 |