Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666456 | Method and apparatus for treating a workpiece with arrays of nozzles | Jimmy D. Collins, David DeKraker, Tracy A. Gast | 2017-05-30 |
| 9564378 | Detection of lost wafer from spinning chuck | Michael Gruenhagen | 2017-02-07 |