Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9540725 | Method and apparatus for beam deflection in a gas cluster ion beam system | Kenneth Regan, Yan Shao, Christopher K. Olsen | 2017-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9540725 | Method and apparatus for beam deflection in a gas cluster ion beam system | Kenneth Regan, Yan Shao, Christopher K. Olsen | 2017-01-10 |