Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837981 | Temperature compensated plate resonator | Antti Jaakkola, Panu Pekko, Tuomas Pensala | 2017-12-05 |
| 9559660 | Micromechanical devices comprising n-type doping agents | Tuomas Pensala, Antti Jaakkola, Maria Ganchenkova, Jyrki Kiihamäki | 2017-01-31 |