Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805936 | Method for producing nickel thin film on a Si substrate by chemical vapor deposition method, and method for producing Ni silicide thin film on Si substrate | Shunichi Nabeya, Ryosuke Harada, Takayuki Sone, Michihiro Yokoo | 2017-10-31 |