Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793127 | Plasma generation and pulsed plasma etching | Chao-Cheng Chen | 2017-10-17 |
| 9685344 | Method of fabricating a semiconductor device including a plurality of isolation features | Chih-Tang Peng, Shun-Hui Yang, Ryan Chia-Jen Chen, Chao-Cheng Chen | 2017-06-20 |
| 9613819 | Process chamber, method of preparing a process chamber, and method of operating a process chamber | Ming-Ching Chang, Yuan-Sheng Huang, Jui-Ming Chen, Chao-Cheng Chen | 2017-04-04 |
| 9570319 | Method of manufacturing a semiconductor device | Ming-Ching Chang, Chao-Cheng Chen | 2017-02-14 |
| 9548305 | Semiconductor devices and methods of manufacture thereof | Ming-Ching Chang, I-Yin Lu, Jih-Jse Lin, Chao-Cheng Chen | 2017-01-17 |