Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761488 | Method for cleaning via of interconnect structure of semiconductor device structure | Che-Cheng Chang, Wei-Ting Chen, Wei-Yin Shiao | 2017-09-12 |
| 9536964 | Method for forming via profile of interconnect structure of semiconductor device structure | Wei-Yin Shiao, Che-Cheng Chang, Wei-Ting Chen | 2017-01-03 |