Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824940 | Intelligent metrology based on module knowledge | Victor Lu | 2017-11-21 |
| 9691587 | Dimension measurement apparatus calibration standard and method for forming the same | — | 2017-06-27 |
| 9659766 | Method for forming semiconductor structure with etched fin structure | — | 2017-05-23 |
| 9613959 | Method of forming metal gate to mitigate antenna defect | — | 2017-04-04 |