Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9770092 | Brush, back surface treatment assembly and method for cleaning substrate | Yao-Yuan SHANG | 2017-09-26 |
| 9570334 | Method and system for positioning wafer in semiconductor manufacturing fabrication | Yao-Yuan SHANG, Chune-Te YANG, Chi-Hsin Chan, Chung-Jhieh Chen | 2017-02-14 |