Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9727049 | Qualitative fault detection and classification system for tool condition monitoring and associated methods | Chia-Tong Ho, Po-Feng Tsai, Jung-Chang Chen, Tze-Liang Lee, Jo Fei Wang +1 more | 2017-08-08 |
| 9698065 | Real-time calibration for wafer processing chamber lamp modules | Chih-Tien Chang, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2017-07-04 |