Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576771 | High energy ion implanter, beam current adjuster, and beam current adjustment method | Kouji Kato | 2017-02-21 |
| 9564292 | Ion beam measuring device and method of measuring ion beam | Noriyasu Ido, Kazuhiro Watanabe | 2017-02-07 |