Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753350 | Mach-Zehnder modulator, method of making optical waveguide structure | Masataka Watanabe, Hideki Yagi | 2017-09-05 |
| 9638980 | Modulator and production method thereof | Hideki Yagi, Hirohiko Kobayashi, Naoya KONO | 2017-05-02 |
| 9563100 | Optical semiconductor device and method of producing the same | Ryuji Masuyama, Naoya KONO, Daisuke Kimura, Hirohiko Kobayashi, Hideki Yagi | 2017-02-07 |
| 9543182 | Electrostatic chuck and method of manufacturing semiconductor device | Akira Furuya | 2017-01-10 |