Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9614124 | Substrate having annealed aluminum nitride layer formed thereon and method for manufacturing the same | Hiroyuki Fukuyama | 2017-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9614124 | Substrate having annealed aluminum nitride layer formed thereon and method for manufacturing the same | Hiroyuki Fukuyama | 2017-04-04 |