Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758871 | Method and apparatus for manufacturing epitaxial silicon wafer | — | 2017-09-12 |
| 9685315 | Method of producing epitaxial wafer and the epitaxial wafer having a highly flat rear surface | Sumihisa Masuda | 2017-06-20 |
| 9631297 | Method of producing epitaxial silicon wafer and epitaxial silicon wafer | Sumihisa Masuda | 2017-04-25 |