Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9753279 | Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof | Benedetto Vigna, Marco Ferrera, Marco Salina | 2017-09-05 |
| 9544573 | Mirror micromechanical structure and related manufacturing process | Roberto Carminati, Sebastiano Conti | 2017-01-10 |