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Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
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2017-11-21 |
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Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
Stefano Losa, Raffaella Pezzuto, Roberto Campedelli, Luigi Esposito, Mikel Azpeitia Urquia |
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Dry scribing methods, devices and systems |
Pietro Petruzza, Ilaria Gelmi, Laura Maria Castoldi |
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| 9628919 |
Wafer level assembly of a MEMS sensor device and related MEMS sensor device |
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2017-04-18 |