Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9815687 | MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress | — | 2017-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9815687 | MEMS device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress | — | 2017-11-14 |