Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805993 | Device for determining the temperature of a substrate | Hartmut Rick, Jürgen Niess | 2017-10-31 |
| 9711388 | Substrate holder and a device and a method for treating substrates | Johann Georg Reichart, Wilhelm Kegel, Günther Kummer, Reinhold Obst | 2017-07-18 |
| 9612158 | Device for determining the temperature of a substrate | Denise Reichel, Jeff Gelpey, Wolfgang Skorupa, Thomas Schumann | 2017-04-04 |