Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9696541 | Two-dimensional optical deflector including two SOI structures and its manufacturing method | — | 2017-07-04 |
| 9632309 | Piezoelectric and electromagnetic type two-dimensional optical deflector and its manufacturing method | — | 2017-04-25 |
| 9612434 | Piezoelectric device including conductive layer, its manufacturing method and optical deflector | — | 2017-04-04 |