Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9757775 | Chamber cleaning method using F2 and a process for manufacture of F2 for this method | — | 2017-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9757775 | Chamber cleaning method using F2 and a process for manufacture of F2 for this method | — | 2017-09-12 |