Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834705 | Polishing slurry and method of polishing substrate using the same | — | 2017-12-05 |
| 9790401 | Abrasive particles, polishing slurry and method of fabricating abrasive particles | — | 2017-10-17 |
| 9757000 | Cleaning device | Hyun Joo Kim, Sang Won Lee, Dong Suk Ko, Eung Ryeol Seo, Hyeon Joon Oh +3 more | 2017-09-12 |
| 9758698 | Polishing slurry and substrate polishing method using the same | — | 2017-09-12 |
| 9562287 | Method for producing hexagonal boron nitride film using borazine oligomer as a precursor | Myung Jong Kim, Sungchan Park, Hyunjin Cho, Sukang Bae, Jung-ho Kang +2 more | 2017-02-07 |