Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841668 | Photomasks for reducing thermal stress generated by heat | — | 2017-12-12 |
| 9664996 | Photomasks for reducing thermal stress generated by heat | — | 2017-05-30 |
| 9599887 | Photo mask including pre-alignment keys and photolithography apparatus performing a pre-alignment process for the photo mask | — | 2017-03-21 |