Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9821998 | Stacked-die MEMS resonator system | Pavan Gupta, Markus Lutz | 2017-11-21 |
| 9800222 | Frequency compensated oscillator design for process tolerances | Markus Lutz | 2017-10-24 |
| 9771257 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2017-09-26 |
| 9774313 | Laterally-doped MEMS resonator | Charles I. Grosjean, Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Markus Lutz | 2017-09-26 |
| 9758371 | Encapsulated microelectromechanical structure | Markus Lutz, Pavan Gupta | 2017-09-12 |
| 9695036 | Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same | Renata Melamud Berger, Ginel C. Hill, Paul M. Hagelin, Charles I. Grosjean, Joseph C. Doll +1 more | 2017-07-04 |
| 9677948 | MEMS device with micromachined thermistor | Carl Arft, Paul M. Hagelin | 2017-06-13 |
| 9667223 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2017-05-30 |