Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704727 | EFEM | Mikio Segawa, Yasushi Taniyama, Atsushi Suzuki, Toshihiro Kawai, Kunihiko Sato | 2017-07-11 |
| 9685359 | Load port device | Manabu Funato, Mitsutoshi Ochiai | 2017-06-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704727 | EFEM | Mikio Segawa, Yasushi Taniyama, Atsushi Suzuki, Toshihiro Kawai, Kunihiko Sato | 2017-07-11 |
| 9685359 | Load port device | Manabu Funato, Mitsutoshi Ochiai | 2017-06-20 |