Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593008 | MEMS sensor including an over-travel stop and method of manufacture | Matthew Julian Thompson, Ilya Gurin, Joseph Seeger | 2017-03-14 |
| 9556019 | Cavity pressure modification using local heating with a laser | Martin Lim | 2017-01-31 |