Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718674 | Thin capping for MEMS devices | Thorbjörn Ebefors, Niklas Svedin | 2017-08-01 |
| 9620390 | Method of making a semiconductor device having a functional capping | Thorbjörn Ebefors, Tomas Bauer | 2017-04-11 |
| 9607915 | Through substrate vias and device | Ulf Erlesand | 2017-03-28 |