Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601649 | Method for producing a microsystem having a thin film made of lead zirconate titanate | Carsten Giebeler, Thorsten Steinkopff, Wolfram Wersing | 2017-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601649 | Method for producing a microsystem having a thin film made of lead zirconate titanate | Carsten Giebeler, Thorsten Steinkopff, Wolfram Wersing | 2017-03-21 |