Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837297 | Tray and wafer holding apparatus | Koki Tamagawa, Tadayoshi Yoshikawa, Naoto Watanabe, Miki Saito | 2017-12-05 |
| 9660557 | Electrostatic chuck and method for manufacturing the electrostatic chuck | Jiro Kawai | 2017-05-23 |