Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764443 | Method of producing carrier for use in double-side polishing apparatus and method of double-side polishing wafers | Kazuya Sato, Yuki Tanaka, Kenji Iha, Toshinari Kinjo | 2017-09-19 |