Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850595 | Method for heat treatment of silicon single crystal wafer | Hiroyuki Kamada | 2017-12-26 |
| 9783912 | Silicon single crystal growing apparatus and method for growing silicon single crystal | Kosei Sugawara | 2017-10-10 |
| 9773710 | Method for evaluating concentration of defect in silicon single crystal substrate | Hiroyuki Kamada | 2017-09-26 |
| 9650725 | Method for manufacturing a defect-controlled low-oxygen concentration silicon single crystal wafer | Hiroyuki Kamada, Kosei Sugawara | 2017-05-16 |