Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837248 | Ion implantation apparatus and method of controlling ion implantation apparatus | Masahide Ooura, Daisuke Imai | 2017-12-05 |
| 9646837 | Ion implantation method and ion implantation apparatus | Yasuharu Okamoto, Masaki Ishikawa, Takeshi Kurose, Akihiro Ochi | 2017-05-09 |
| 9601314 | Ion implantation apparatus and ion implantation method | Tetsuya Kudo | 2017-03-21 |