Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786495 | Method for evaluating semiconductor film and method for manufacturing semiconductor device | Akihisa Shimomura, Naoki OKUNO, Mitsuhiro Ichijo, Tetsuhiro Tanaka, Sachiaki Tezuka | 2017-10-10 |