Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691638 | Apparatus for treating substrate and method for discharging supercritical fluid | Yong Hyun Choi, Kibong Kim, Woo Young Kim | 2017-06-27 |
| 9679788 | Apparatus and method for treating substrate | Eunsun Jung, Woo Young Kim, Chan Young Heo | 2017-06-13 |