Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9597704 | Plasma boundary limiter unit and apparatus for treating substrate | Il-Gyo Koo | 2017-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9597704 | Plasma boundary limiter unit and apparatus for treating substrate | Il-Gyo Koo | 2017-03-21 |