Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715996 | Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatus | — | 2017-07-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715996 | Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatus | — | 2017-07-25 |