Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9758902 | Method for producing 3C-SiC epitaxial layer, 3C-SiC epitaxial substrate, and semiconductor device | Noriyasu Kawana | 2017-09-12 |
| 9732439 | Method of forming a laminate of epitaxially grown cubic silicon carbide layers, and method of forming a substrate-attached laminate of epitaxially grown cubic silicon carbide layers | — | 2017-08-15 |
| 9536954 | Substrate with silicon carbide film, semiconductor device, and method for producing substrate with silicon carbide film | — | 2017-01-03 |