Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829794 | Exposure apparatus, and method of manufacturing device | — | 2017-11-28 |
| 9792080 | Information mediation system, information mediation method, information accumulating system, and information processing method | Masahiko Mizuta, Takumi Oribe | 2017-10-17 |
| 9563134 | Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system | — | 2017-02-07 |