Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828676 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Koji Kaneyama | 2017-11-28 |
| 9728434 | Substrate processing apparatus, storage device, and method of transporting substrate storing container | Kensaku Onishi, Jun Yamamoto | 2017-08-08 |
| 9566598 | Substrate processing apparatus and substrate processing method | — | 2017-02-14 |
| 9553007 | Coating method and coating apparatus | Tomohiro Goto | 2017-01-24 |