Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685363 | Alignment device and substrate processing apparatus | — | 2017-06-20 |
| 9539607 | Substrate processing apparatus and substrate processing method | Joji Kuwahara, Takashi Taguchi, Kohei Iwasaki | 2017-01-10 |