Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728547 | Three-dimensional memory device with aluminum-containing etch stop layer for backside contact structure and method of making thereof | Hiroshi Kariya, Takuro Maede, Takeshi Kawamura | 2017-08-08 |