Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546420 | Methods of depositing an alpha-silicon-carbide-containing film at low temperature | — | 2017-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546420 | Methods of depositing an alpha-silicon-carbide-containing film at low temperature | — | 2017-01-17 |