Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9843284 | System for controlling fault tolerance | Young Ho Hwang, Jang-Hwan Kim | 2017-12-12 |
| 9812372 | Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck | Youn Sok CHOI, Jeong Hyoun Sung | 2017-11-07 |